Holding a near-monopoly in Extreme Ultraviolet (EUV) lithography, ASML is the sole supplier of EUV machines ... in legacy technologies like KrF (Krypton Fluoride) and I-line lithography, these ...
According to ASML Lithography is at the heart ... (with 11 units sold in Q3 24 against 42 for KrF, for example), Extreme Ultraviolet machines already represent a good part of ASML's revenue.